Edwards STP 451 Turbomolecular Vacuum Pump - NEW

Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

• Higher gas throughput
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
• Harsh process compatible
• Increased life

Advanced Controller Design

• Auto tuning
• Self diagnostic functions
• DC motor drive
• Battery-free operation

Compact Design

• Small footprint
• Half rack controller

5 Axis Magnetic Suspension System

• Zero contamination
• Low maintenance
• Any orientation operation