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產(chǎn)品名稱: Edwards STPA2203C 磁懸浮分子泵
產(chǎn)品型號(hào): YT4V66001
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards STPA2203C 磁懸浮分子泵
的詳細(xì)介紹
Edwards STPA2203C Turbomolecular Vacuum Pump - NEW
Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for battery-free operation. The STPA2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Design
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Higher gas throughput
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Maximized process flexibility
5 Axis Magnetic Suspension System
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Zero contamination
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Low maintenance
Corrosion Resistant
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Harsh process compatible
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Increased life
Compact Design
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Small footprint
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Half rack controller
Advanced Controller Design
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Auto tuning
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Self diagnostic functions
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DC motor drive
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Battery-free operation
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Inlet flange
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ISO-250F
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Outlet port
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KF-40
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Purge port
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KF-10
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Water cooling fitting
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PT1/4
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Pumping speed
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N2
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2,200 l/s
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H2
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1,700 l/s
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Compression ratio
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N2
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> 108
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H2
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> 2.5 x 104
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Ultimate pressure
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10-6 Pa (10-8 Torr)
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Max. allowable backing pressure
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400 Pa (3 Torr)
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Max. nitrogen throughput
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1,500 sccm
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Rated speed
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27,000
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Starting time
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7 min
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Mounting position
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Any
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Water cooling flow
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2 l/min-1
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Water cooling temperature
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5 - 25°C
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Pressure
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0.3 MPa
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Recommended purge gas flow
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20 sccm
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Input voltage
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200 to 240 VAC
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Power consumption
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1.5 kVA
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Weight
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61 kg
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Edwards STPA2203C Turbomolecular Vacuum Pump - NEW
P/N YT4V-0Z-002 / YT4V0Z002 STPA2203C ISO-250F
P/N YT4V-0Z-003 / YT4V0Z003 STPA2203C DN 250 CF
P/N YT4V-66-001 / YT4V66001 STPA2203CV ISO-250F TMS
YT4V-66-002 / YT4V66002 STPA2203CV DN 250 CF TMS
